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Fault Phenomenon | Cause | Solution |
Rough valve can not be opened | Compressed air pressure is enough or not | Pressure should be 0.4-0.6MPa |
Electromagnetic directional valve of rough valve is not working | Refer to fault phenomenon 2 | |
Overtravel-limit switch of high vacuum valve is not compacted | Adjust switch and upper cover plate to suitable place | |
Electromagnetic directional valve is not working | No actuation with electricity | Change coil or whole valve |
Working room temperature is low | Temperature should be higher than 5℃ | |
Valve body has block | Clean valve body and add pump oil | |
Air source pressure is not enough | Pressure should be 0.4-0.6MPa | |
Fore valve can not be opened | Deficient air pressure | Refer to fault phenomenon 2 |
Electromagnetic directional valve is not working | Refer to fault phenomenon 2 | |
High vacuum valve can not be opened | Overtravel-limit switch of rough valve is not compacted | Adjust switch and upper cover plate to suitable place |
Gas source pressure is not enough | Should be 0.4-0.6MPa | |
Electromagnetic directional valve | Refer to fault phenomenon 2 | |
Vacuum degree is not enough(Can not reach vacuum meter setting value) | Compound vacuum meter(working) setting value not less than 5Pa | |
Front valve didn’t open | Open front valve under certain condition | |
Roots pump didn’t open | Vacuum electric contact pressure gage didn’t touch | Pumping air, make big round meter indicator to the left end |
Time-delay is not completed | Wait | |
Air switch is not connected | Connect switch if no issue | |
Diffusion pump is not working | Heating time is not enough | KT-400 is 1 hour; KT-600 is 80 minutes |
Oil pollution | Change pump oil(Dalian NO.3) | |
Vacuum rough pumping is not high | Vacuum degree should be higher than 5Pa | |
Cooling water is not unimpeded | Clean pump cooling water path | |
Not proper oil volume | Add oil or release oil | |
Air inflation is not working | Rough valve and high vacuum valve overtravel-limit switch is not compacted | Adjust switch and upper cover plate to suitable place |
Electromagnetic charging valve is not working | Change coil or valve | |
Fan didn’t open | Electro connecting pressure gauge didn’t touch | Wait for inflation pressure to 0.02MPa |
Rough valve and high vacuum valve overtravel-limit switch is not compacted | Adjust switch and upper cover plate to suitable place | |
Air switch is not connected | Connect switch if no issue | |
Motor is damaged | Fix or change motor | |
Heating current is not balanced confoundedly | Heating voltage close to rated value, current is 0, heater band is broken | Use molybdenum filament to connect or change heater band |
Heater band connected with wall | Use ceramic parts to insulate | |
Mutual inductor is broken, has voltage, no current | Change mutual inductor | |
Ammeter and voltmeter is broken | Change meters |
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